This webinar was originally held on Sunday, September 20, 2020, and is now available for on demand viewing.

The performance and reliability of Quadrupole Mass Spectrometry (QMS) Systems have been improved significantly over the last few years and they are widely used to monitor, optimize and control different vacuum-based processes. There are several developments with respect of improving sensitivity, detection limits and robustness which enabling the use of mass spectrometer to monitor critical process conditions such as CVD, ALD/ALE, etch and other processes.

In this webinar we provide some guidance in selecting and operating quadrupole mass spectrometry (QMS) systems for challenging applications. We have also discuss various methods of system implementation to enhance the value of an integrated QMS based process monitor.