The accurate and precise measurement of pressure and vacuum is critical to the maintenance of control over many of the fabrication processes in the production of electronic, photovoltaic, and other semiconductor devices.
This application note includes,
- An overview of the different measurement systems and metrics in common use for the measurement of pressure and vacuum.
- The different types of instrumentation appropriate for pressure/vacuum measurement have been described and compared with each other.
- Working principles of capacitance manometers and what makes them different.
- MKS Instruments’ Baratron solution for capacitance manometer applications, detailing its features that make the Baratron manometer a superior solution.
